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掃描電鏡 Hitachi CD-SEM S-8820
發布時間: 2018-03-23
Hitachi S8820 CD-SEM
SEM Magnification：1,000x to 150,000x
Wafer imaging ability: Entire surface of 8” wafer
Depth of focus: >= 1.0mm at 80,000x magnification
Resolution:5 nm at 800V on CRT
Optical Microscope: Monochrome CCD camera
Fixed Mag of 110x, Workstation, HP 715-64 computer or later model,Multipoint Measurement Function,Edge Roughness Function,Contact Hole Measurement Function,Automated Image Archiving Function,Leybold 50 turbo on loadlock, Leybold 340 turbo on main chamber,Operating Voltage 100 V AC, 50 Amp
