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    掃描電鏡 CD-SEM S-8840

    發布時間: 2018-03-23

    • 掃描電鏡 CD-SEM S-8840
    • 掃描電鏡 CD-SEM S-8840
    • 掃描電鏡 CD-SEM S-8840

    Original Hitachi CD-SEM 8840  Specification and Key Features:

    1. Hitachi CD-SEM S-8840 General

      • Wafer size :  8-inch or 6-inch (Special carrier for 2 to 5 inch wafers)
      • Principle of CD measurement : Cursor and line profile measurement
      • CD measurement range : 0.1 to 10 μm
      • CD measurement reproducibility : ±1% or 0.005 μm (3 sigma) (threshold method),whichever larger
      • Throughput : 26 wafers/hour (in continuous measurement),1 point/chip, 5 chips/wafer
      • Secondary electron image resolution : 5 nm (50 ?) (at accelerating voltage of 0.8 kV with reference specimen dedicated for resolution measurement)
      • Magnification : x1000 to  x150,000 (SEM image), About x110 (optical microscope image)
    2. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Specimen Stage

      • Movement range : X and Y ; 0 to 200 mm
      • Stage drive : Pulse motor
      • Control and speed : Computer-controlled operation, max. speed 50 mm/s
    3. Hitachi CD-SEM S-8840 Wafer Loader

      • Wafer transfer from cassette to loader chamber : Auto transfer via cassette-to-cassette auto loader
      • Wafer transfer from loader chamber to stage : Auto evacuation and auto loading
    4. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Cassette-to-Cassette Auto Loader

      • Principle of loading : Loading via arm type robot for random access using two cassettes
      • Chucking : Vacuum chucking on back of wafer
      • Orientation flat setting : Non-contact auto detection via optical sensor
    5. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Electron Optics

      • Electron gun : Schottky emission type (having high brightness and long service life)
      • Accelerating voltage : 500 to 1300 V (variable in 10 V steps)
      • Lens system : Electromagnetic condenser lens system, FCM objective lens
      • Secondary electron detection : 2-stage detection system
      • Objective lens aperture : Heating type movable aperture (4 openings selectable outside column), fine adjustment possible
      • Scanning coil : 2-stage deflection
      • Stigmator coil : 8-pole electromagnetic type (X, Y)
      • Probe current monitoring : Faraday cup incorporated, with automatic measurement function
      • Optical microscope : 1.2-mm-square visual field, monochrome image
    6. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Control and Display System

      • Viewing control CRT : EWS (GUI) 20-inch monitor, integral processing image display, interactive computer operation, wafer map display, measured value indication, stage coordinate indication, etc.
      • Scanning modes : TV scan, raster rotation, auto brightness/contrast control
      • Photographing : Photographic recording unit, effective visual field 80 x 80 mm (option)
      • Safety device : Equipped with emergency shut-off switch
    7. Hitachi CD-SEM S-8640 CD Measurement Data Processing System (1 GB hard disk for system program)

      • File storage : 3.5 inch floppy disk drive, 3.5 inch magneto-optic disk drive, with storage function for various parameter files
      • Data processing : Average value, standard deviation, maximum/minimum values
      • Printout : 80-character thermal printer
      • Hard disk capacity varies with instrument serial no
    8. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Vacuum System

      • Principle of evacuation : Full-automatic dry and clean evacuation
      • Vacuum pumping : Ion pump (3 units), turbo molecular pump (2 units), rotary pump (option)(with foreline trap) (2 units)
      • Safety device : Equipped with power fail/vacuum level safety devices
    9. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Dimensions

      • Main column unit : 1170W x 1890D x 1650H mm, 1100 kg
      • Display unit : 600W x 1331D x 1800H mm, 320 kg
      • Power supply unit : 535W x 600D x 1500H mm, 200 kg
      • Rotary pump(option) : 360W x 640D x 520H mm, 30 kg/unit
    10. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Standard System Composition

      • Main column unit ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? 1
      • Display unit ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? 1
      • Power supply unit? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? 1
      • Photographing unit (option)? ? ? ? ? ? ? ? ? ? ? ? ? ?1
      • Rotary pump (option) ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? 2
      • Instruction manual ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? 1

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