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    掃描電鏡 S-5000

    發布時間: 2018-03-22

    • 掃描電鏡 S-5000
    • 掃描電鏡 S-5000
    • 掃描電鏡 S-5000
    • 掃描電鏡 S-5000

    Specification
    1)Resolution
    (1)Secondary optics image:
    0.6nm (Accelerating voltage 30kV) (For 0.3mm 
    edge space of specimen with magnification of 500,000x)
    3.0nm (Accelerating voltage 1kV, at HIGH-Z Mode) (For 0.3mm edge space of specimen with magnification 100,000x)
    2)Magnification: 30x-500x (Low mode)
                    500x-1,000,000x (High mode)
    3)Electron Optics System
    (1) Electron gun: Cold field emission electron gun
                      Built-in  Electrostatic lens
                      Built-in anode heater
    (2) Accelerating voltage: 0.5-30kV (0.1kV step)
    (3) Lens system: Triple electron lens with demagnification system
    (4) Stigmation: 8-pole electron system (X, Y)
    (5) Deflection coil: Double electron deflection system
    (6) Objective aperture: Mobile aperture (4-position aperture strip, Selectable and alienable from out side the vacuum)
    4)Specimen Adjuster 
    (1) System: Side-entry system
    (2) Moving area: X= ±3.5mm, Y= ±2mm, Z= ±0.3mm, T= ±40°
    (3) Specimen size: 9.5mm x5mm x2.4mmH (MAX) (With normal holder)
                       9.5mm x5mm x4.4mmH (MAX) (With normal holder, at HIGH-Z mode)
                       20mm x6mm x2.4mmH (MAX) (With large holder)
                       20mm x6mm x4.4mmH (MAX) (With large holder, at HIGH-Z mode)
    (4) Specimen exchange: Airlock system

    5)Detector
    (1) Secondary electron detector
    6)Display
    (1) Image memory: Composition; 512 x512 pixel (Buffer memory) 
    (2) Display system: Image memory built-in Still picture display (All scan line speed)
                        1024 x1024 pixel (High accurate memory) 
    Function; *High accurate (1024 x1024) Image photographing
            *Real-time TV display of slow scanning image (All scanning speed)
            *S/N improvement by averaging TV scanned image
            *Image operation by TV and first scanning (MAX 1024 times)
            *Real-time histogram display (Signal strength analyzing)
            *Double/ Quaternate display
    (3) CRT: CRT for Monitoring use 12" x2 sets (Monochrome x2 sets)
             Ultra high resolution CRT for photographing 7" x1set 
    (4) Scanning mode:
             Normal scanning (TV scanning + Slow scanning)
             Limited rage of view
             Split/Dual mug
             Line scanning
             Position setting
             Spot position
             AAF (Analysis Area Finder)
             SAA (Selected Area Analysis)
    (5) Scanning speed:
    TV, 0.3, 2, 10(9), 20(25) S/Frame ??For monitoring
    40(35), 80(100), 160, 320 S/Frame ??For photographing
    Figures in (  ) are at 60Hz.
    (6) Electrical views: ±3.5?m
    (7) Signal processing: Dynamic focus
                           Auto-image adjustor (Light intensity, contrast)
                           Gamma control, Differential image
                           Auto-focus
    (8) Data saving: Film number
                     Accelerating voltage
                     Magnification
                     Micron value
                     Micron bar
    It can print the date on the film.
    7)Exhaust System
    (1) Pump:Ion pump (60l/s 1set, 20l/s 2sets)
             Turbo-molecular pump (340l/s)
             Dry-pump (1300l/min) 2sets
    (2) Vacuum gauge:
    (3) Vacuum range:
    Pressure: 1 x10-7 Pa (Electron gun room)~10-5Pa (Specimen room)
    8)Security: Power outage, Out of water supply, Security of vacuum rage


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