PRODUCT CENTER
掃描電鏡 S-5000
發布時間: 2018-03-22
Specification
1)Resolution
(1)Secondary optics image:
0.6nm (Accelerating voltage 30kV) (For 0.3mm edge space of specimen with magnification of 500,000x)
0.6nm (Accelerating voltage 30kV) (For 0.3mm edge space of specimen with magnification of 500,000x)
3.0nm (Accelerating voltage 1kV, at HIGH-Z Mode) (For 0.3mm edge space of specimen with magnification 100,000x)
2)Magnification: 30x-500x (Low mode)
500x-1,000,000x (High mode)
3)Electron Optics System
(1) Electron gun: Cold field emission electron gun
Built-in Electrostatic lens
Built-in anode heater
(2) Accelerating voltage: 0.5-30kV (0.1kV step)
(3) Lens system: Triple electron lens with demagnification system
(4) Stigmation: 8-pole electron system (X, Y)
(5) Deflection coil: Double electron deflection system
(6) Objective aperture: Mobile aperture (4-position aperture strip, Selectable and alienable from out side the vacuum)
4)Specimen Adjuster
(1) System: Side-entry system
(2) Moving area: X= ±3.5mm, Y= ±2mm, Z= ±0.3mm, T= ±40°
(3) Specimen size: 9.5mm x5mm x2.4mmH (MAX) (With normal holder)
9.5mm x5mm x4.4mmH (MAX) (With normal holder, at HIGH-Z mode)
20mm x6mm x2.4mmH (MAX) (With large holder)
20mm x6mm x4.4mmH (MAX) (With large holder, at HIGH-Z mode)
(4) Specimen exchange: Airlock system
5)Detector
(1) Secondary electron detector
6)Display
(1) Image memory: Composition; 512 x512 pixel (Buffer memory)
(2) Display system: Image memory built-in Still picture display (All scan line speed)
1024 x1024 pixel (High accurate memory)
Function; *High accurate (1024 x1024) Image photographing
*Real-time TV display of slow scanning image (All scanning speed)
*S/N improvement by averaging TV scanned image
*Image operation by TV and first scanning (MAX 1024 times)
*Real-time histogram display (Signal strength analyzing)
*Double/ Quaternate display
(3) CRT: CRT for Monitoring use 12" x2 sets (Monochrome x2 sets)
Ultra high resolution CRT for photographing 7" x1set
(4) Scanning mode:
Normal scanning (TV scanning + Slow scanning)
Limited rage of view
Split/Dual mug
Line scanning
Position setting
Spot position
AAF (Analysis Area Finder)
SAA (Selected Area Analysis)
(5) Scanning speed:
TV, 0.3, 2, 10(9), 20(25) S/Frame ??For monitoring
40(35), 80(100), 160, 320 S/Frame ??For photographing
Figures in ( ) are at 60Hz.
(6) Electrical views: ±3.5?m
(7) Signal processing: Dynamic focus
Auto-image adjustor (Light intensity, contrast)
Gamma control, Differential image
Auto-focus
(8) Data saving: Film number
Accelerating voltage
Magnification
Micron value
Micron bar
It can print the date on the film.
7)Exhaust System
(1) Pump:Ion pump (60l/s 1set, 20l/s 2sets)
Turbo-molecular pump (340l/s)
Dry-pump (1300l/min) 2sets
(2) Vacuum gauge:
(3) Vacuum range:
Pressure: 1 x10-7 Pa (Electron gun room)~10-5Pa (Specimen room)
8)Security: Power outage, Out of water supply, Security of vacuum rage
